2026-10-08T06:57:43Z https://api.figshare.com/v2/oai

oai:figshare.com:article/33889060 2026-09-17T11:55:49Z portal_1197 item_type_3 month_year_09_2026

Data for Atomic layer deposition of hafnium oxide passivating layers on silicon : impact of precursor selection Sophie L. Pain (25017316) Anup Yadav (25017658) David Walker (36297) Nicholas E. Grant (6877136) John D. Murphy (25017325) Hafnium Hafnium oxide Atomic layer deposition Surface chemistry Silicon -- Surfaces Thin films Migrated from ePrints No description provided 2024-08-05T00:00:00Z Dataset Dataset 10.82444/warw.33889060.v1 https://figshare.com/articles/dataset/Data_for_Atomic_layer_deposition_of_hafnium_oxide_passivating_layers_on_silicon_impact_of_precursor_selection/33889060 CC BY 4.0