2026-10-10T11:23:45Z https://api.figshare.com/v2/oai

oai:figshare.com:article/33863671 2026-09-16T16:59:25Z portal_1197 item_type_3 month_year_09_2026

Data to support "Stable chemical enhancement of passivating nanolayer structures grown by atomic layer deposition on silicon" Sophie Pain (23223889) Edris Khorani (24860734) Tim Niewelt (24860737) Ailish Wratten (24860728) Marc Walker (1429663) Nicholas E. Grant (6877136) John D. Murphy (6877151) Migrated from ePrints Dataset to support a paper forthcoming in the journal 'Nanoscale' 2026-09-16T16:59:25Z Dataset Dataset 10.82444/warw.33863671.v1 https://figshare.com/articles/dataset/Data_to_support_Stable_chemical_enhancement_of_passivating_nanolayer_structures_grown_by_atomic_layer_deposition_on_silicon_/33863671 CC BY 4.0