2026-10-13T14:26:49Z https://api.figshare.com/v2/oai

oai:figshare.com:article/33819052 2026-09-15T19:10:46Z category_1 category_4 category_146 category_915 category_16 category_21 category_272 category_873 category_39 category_133 portal_63 item_type_2 month_year_09_2026

Capillary-Driven Flow in Triangular Nanofluidic Channel Fabricated via Nanoimprint Lithography with Heterogeneous Semiconductor Materials Yi-Hsin Wang (10012820) Kang-Yuan Lee (24952753) Chung-Hsiang Lin (477099) Chao-Min Cheng (267550) Biophysics Biochemistry Space Science Physical Sciences not elsewhere classified Physiology Biotechnology Environmental Sciences not elsewhere classified Chemical Sciences not elsewhere classified Ecology Plant Biology test liquids ranged providing quantitative insights liquids commonly used heterogeneous semiconductor materials 32 – 3 multilayer nanofluidic architectures analytical nanofluidic devices driven flow transport driven flow behaviors layer nanofluidic channels layer channels demonstrated calculated capillary pressures 46 – 1 passive capillary flow 3 </ sub driven flow nanofluidic channels results demonstrated silicon nitride pressure drops liquid viscosity investigate capillary hollow single gallium nitride future biomedical film deposition fabrication strategy fabricated single biological applications 86 μm 65 kpa 27 mpa In this study, hollow single- and triple-layer triangular nanofluidic channels with heterogeneous semiconductor walls composed of gallium nitride (GaN) and silicon nitride (Si₃N₄) were fabricated via nanoimprint lithography and PECVD-based thin-film deposition to investigate capillary-driven flow behaviors of liquids commonly used in biological applications. The fabricated single-layer channels enabled quantitative characterization of capillary-driven flow transport, while the triple-layer channels demonstrated the feasibility of extending the fabrication strategy to multilayer nanofluidic architectures. The measured flow velocities inside single-layer nanofluidic channels for the test liquids ranged from 0.17 to 16.86 μm/s. Based on the experimentally measured flow velocities, the calculated capillary pressures, pressure drops, and average wall shear stresses were 0.46–1.27 MPa, 27–113 Pa, and 1.32–3.65 kPa, respectively. The results demonstrated that liquid viscosity and surface wettability would influence capillary-driven flow transport, providing quantitative insights into passive capillary flow in nanofluidic channels and establishing a foundation for the design of future biomedical and analytical nanofluidic devices. 2026-09-15T00:00:00Z Dataset Media 10.1021/acsomega.6c07925.s005 https://figshare.com/articles/media/Capillary-Driven_Flow_in_Triangular_Nanofluidic_Channel_Fabricated_via_Nanoimprint_Lithography_with_Heterogeneous_Semiconductor_Materials/33819052 CC BY-NC 4.0