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oai:figshare.com:article/33792121 2026-09-15T12:22:04Z portal_1197 item_type_3 month_year_09_2026

Data for Anodic oxidations : excellent process durability and surface passivation for high efficiency silicon solar cells Nicholas E. Grant (6877136) T. C. Kho (24899617) K. C. Fong (2985903) E. Franklin (23319178) K. R. McIntosh (24932755) M. Stocks (24932758) Y. Wang (473169) Er-Chien Wang (24930172) N. S. Zin (24932761) John D. Murphy (6877151) A. Blakers (20000604) Electrolytic oxidation Silica Silicon Solar cells Silicon solar cells Silicon solar cells -- Effect of high temperatures on Surface chemistry Migrated from ePrints We investigate the versatility of anodically grown silicon dioxide (SiO2) films in the context of process durability and exceptional surface passivation for high efficiency (>23%) silicon solar cell architectures. We show that a room temperature anodic oxidation can achieve a thickness of ~70 nm within ~30 min, comparable to the growth rate of a thermal oxide at 1000 °C. We demonstrate that anodic SiO2 films can mask against wet chemical silicon etching and high temperature phosphorus diffusions, thereby permitting a low thermal budget method to form patterned structures. We investigate the saturation current density J0 of anodic SiO2/silicon nitride stacks on phosphorus diffused and undiffused silicon and show that a J0 of <10 fA cm−2 can be achieved in both cases. Finally, to showcase the anodic SiO2 films on a device level, we employed the anodic SiO2/silicon nitride stack to passivate the rear surface of an interdigitated back contact solar cell, achieving an efficiency of 23.8%.<br><br>-->Software required Microsoft Excel --> Organisation One sheet per figure containing the data used in the related paper -->Nature of the data Captions to the figures are given in the paper. Abbreviations, variables and methods used are defined in the paper. 2020-02-25T00:00:00Z Dataset Dataset 10.82444/warw.33792121.v1 https://figshare.com/articles/dataset/Data_for_Anodic_oxidations_excellent_process_durability_and_surface_passivation_for_high_efficiency_silicon_solar_cells/33792121 CC BY 4.0