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Data for Microstructural evolution of mechanically deformed polycrystalline silicon for kerfless photovoltaics M. Wu (1270383) John D. Murphy (6877151) J. Jiang (699563) P. R. Wilshaw (24843112) A. J. Wilkinson (17212918) Polycrystals Microstructure Silicon Photovoltaic power generation Electrons -- Backscattering Diffraction Migrated from ePrints Silicon wafers for photovoltaics could be produced without kerf loss by rolling, provided sufficient control of defects such as dislocations can be achieved. Here we report a study using mainly high resolution electron backscatter diffraction (HR-EBSD) of the microstructural evolution of Siemens polycrystalline silicon feedstock during a series of processes designed to mimic high temperature rolling. The starting material is heavily textured and annealing at 1400 ˚C results in 90% recrystallization and a reduction in average geometrically necessary dislocation (GND) density from >1014 m-2 to 1013 m-2. Subsequent compression at 1150 ˚C – analogous to rolling – produces subgrain boundaries seen as continuous curved high GND content linear features spanning grain interiors. Post-deformation annealing at 1400 ˚C facilitates a secondary recrystallization process, resulting in large grains typically of 100 µm diameter. HR-EBSD gives the final average GND density in as 3.2  1012 m-2 . This value is considerably higher than the dislocation density of 5  1010 m-2 from etch pit counting, so the discrepancy was investigated by direct comparison of GND maps and etch pit patterns. The GND map from HR-EBSD gives erroneously high values at the method’s noise floor (~1012 m-2) in regions with low dislocation densities.<br><br>The dataset (a single file in XLSX format) contains the data behind Figure 5 in the paper. Captions to the figure is given in the paper. Abbreviations, variables and methods used are defined in the paper. Please address any queries to john.d.murphy@warwick.ac.uk. 2018-08-01T00:00:00Z Dataset Dataset 10.82444/warw.33764599.v1 https://figshare.com/articles/dataset/Data_for_Microstructural_evolution_of_mechanically_deformed_polycrystalline_silicon_for_kerfless_photovoltaics/33764599 CC BY 4.0