2026-10-06T05:19:58Z https://api.figshare.com/v2/oai

oai:figshare.com:article/33465643 2026-09-23T12:02:30Z category_36833 portal_1075 item_type_2 month_year_09_2026

clean supplementary material Chan Feng (6040529) De-Qi Wen (24724066) Jon Gudmundsson (12483198) John Verboncoeur (19138336) Julian Schulze (13410355) You-Nian Wang (24724069) Physical sciences Low-temperature plasma physics ion energy distribution capacitively coupled plasmas self-dc bias voltage waveform tailoring clean supplementary material 2026-09-23T12:02:30Z Dataset Media 10.60893/figshare.apl.33465643.v1 https://figshare.com/articles/media/clean_supplementary_material/33465643 CC BY-NC 4.0