2026-10-11T19:29:10Z https://api.figshare.com/v2/oai

oai:figshare.com:article/33433636 2026-09-25T12:04:42Z category_31817 portal_1075 item_type_2 month_year_09_2026

Supporting Material Fabian Holzmeier (1453423) Michiel van Setten (18568072) Ragnar Björnsson (24707113) Robert Richter (1296501) Filipe Ferreira da Silva (23227867) Oddur Ingólfsson (23227870) Chemical sciences EUV lithography photoresists dissociative photoionization supporting material to the manuscript 2026-09-25T12:04:42Z Dataset Media 10.60893/figshare.jcp.33433636.v1 https://figshare.com/articles/media/Supporting_Material/33433636 CC BY 4.0