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oai:figshare.com:article/33352215 2026-09-30T12:54:45Z category_31817 portal_1075 item_type_1 month_year_09_2026

Supplementary Material: Area Selective Atomic Layer Deposition of ruthenium with pinacolborane as a small molecule inhibitor Sundas Ismaeel (22332784) Heta-Elisa Nieminen (6837584) Mykhailo Chundak (9986311) Mikko Ritala (559215) Chemical sciences Ru thin ALD film area selective deposition of Ru small molecule inhibitor . SEM images of different surfaces with 300 and 1000 ALD cycles . Wide scan XPS spectrum of a Pt surface showing the lack of boron.<p></p> 2026-09-30T12:54:45Z Image Figure 10.60893/figshare.jva.33352215.v2 https://figshare.com/articles/figure/Supplementary_Material_Area_Selective_Atomic_Layer_Deposition_of_ruthenium_with_pinacolborane_as_a_small_molecule_inhibitor/33352215 CC BY 4.0