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          <dc:title>Supplementary Information</dc:title>
          <dc:creator>Dadam Kang (23224099)</dc:creator>
          <dc:creator>Loïs Talli (23224096)</dc:creator>
          <dc:creator>John Niroula (18500313)</dc:creator>
          <dc:creator>Elham Borujeny (23224102)</dc:creator>
          <dc:creator>Tomás Palacios (18500334)</dc:creator>
          <dc:creator>Joseph Casamento (3592730)</dc:creator>
          <dc:subject>Engineering</dc:subject>
          <dc:subject>ga2o3</dc:subject>
          <dc:subject>thin film</dc:subject>
          <dc:subject>electrical transport</dc:subject>
          <dc:subject>atomic layer deposition</dc:subject>
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