2026-10-12T09:11:18Z https://api.figshare.com/v2/oai

oai:figshare.com:article/33130223 2026-09-18T07:06:30Z category_842 portal_81 item_type_3 month_year_09_2026

Exposure dose-dependent multi-tone photolithography via photoacid-induced crosslinking/degradation of poly(2,3-dihydrofuran) Jun-Dan Huang (24493122) Xiao Tan (24493132) Jun Liu (24493134) Bo Zhao (24493135) Hong-Qiang Li (24493138) Ying-Yi Ren (24493140) Rui Tian (24493141) Yisi Xiong (24493144) Chong Li (24493146) Ming-Kui Wang (24493152) Shi-Li Xiang (24493161) Ming-Qiang Zhu (24493170) Macromolecular and Materials Chemistry not elsewhere classified Photoresist Poly(2,3-dihydrofuran) Multi-tone patterning Source data supporting the findings of this study. 2026-09-18T07:06:30Z Dataset Dataset 10.6084/m9.figshare.33130223.v1 https://figshare.com/articles/dataset/Exposure_dose-dependent_multi-tone_photolithography_via_photoacid-induced_crosslinking_degradation_of_poly_2_3-dihydrofuran_/33130223 CC BY 4.0